D396 14 880 Issue H Instruction Manual EXC Turbomolecular Pump Controllers Description Item Number EXC120 Controller D396 16 000 EXC120E Controller D396 17 000 EXC300 Controller D396 14 000 EXC300M Controller D396 15 000 M BOC EDWARDS Manor Royal Crawley West Sussex RH10 2LW UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com Declaration of Conformity We BOC Edwards Manor Royal Crawley West Sussex RH10 2LW UK
Betriebsanleitung Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Unit TC 600 TMH 071 P TMU 071 P PM 0504 BE K 0601 PFEIFFER E VACUUM Index 1 1 1 2 2 1 22 3 1 32 33 3 4 3 5 3 6 3J 38 3 9 3 10 3 11 3 1 4 1 42 43 4 4 4 5 4 6 47 2 Safety Instructions 3 For Your Orientation Pictogram Definitions Understandi
Edition 07 January 02 Welcome Dear Customer You have just purchased an Alcatel maglev hybrid turbo pump We would like to thank you and are proud to count you as one of our customers This product has benefited from Alcatel s many years of experience in the field of turbomolecular pump design In order to ensure the best possible performance of the equipment and your complete satisfaction in using it we advise you to read this manual carefully before any