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1. ABSTRACT CLARK, DAVID HAMILTON. Ion Energy

ABSTRACT CLARK DAVID HAMILTON Ion Energy Distribution Functions Using Multi frequency Harmonic Drive Under the direction of Dr Steven Shannon Multi frequency RF power delivery for IEDF control has become commonplace in semiconductor manufacturing particularly in plasma etch applications Recently two frequency drives where the higher drive frequency is a harmonic of the lower drive frequency have shown interesting influence on IEDF s with phase acting as an additional t
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19. ABSTRACT CLARK, DAVID HAMILTON. Ion Energy

ABSTRACT CLARK DAVID HAMILTON Ion Energy Distribution Functions Using Multi frequency Harmonic Drive Under the direction of Dr Steven Shannon Multi frequency RF power delivery for IEDF control has become commonplace in semiconductor manufacturing particularly in plasma etch applications Recently two frequency drives where the higher drive frequency is a harmonic of the lower drive frequency have shown interesting influence on IEDF s with phase acting as an additional t
PDF Manual ENGLISH
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