oerlikon leybold vacuum deal vacuum products be www idealvac com TURBOVAC SL 80 Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Incorporation Declaration amp Operating Instructions 130000760_002_A1 Part Nos 800002V3001 800002V3004 Contents 0 1 0 2 0 3 0 4 0 5 0 6 0 7 1 1 1 2 1 3 1 4 1 5 3 1 3 1 4 3 2 3 3 3 4 3 5 3 6 3 7 3 8 3 8 1 3 8 2 3 8 3 3 8 4 Important Safety Information Mech
User manual ECONOMY Manufactured by HFE vacuum systems Het Sterrenbeeld 36 5215 ML s Hertogenbosch The Netherlands P O Box 2261 5202 CG s Hertogenbosch The Netherlands tel 31 0 73 627 1271 fax 31 0 73 6271200 http Awww hfe nl e mail info hfe nI Englisch 2004 HFE Vacuum Systems BV All rights reserved No part of this document may be reproduced and or published by means of printing photocopy microfilm or any other method without the prior writ
cerlikon leybold vacuum TURBOVAC SL 700 Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Operating Instructions 130000762 002 A0 Part Nos 800051V3001 800051V3002 Contents 2 8 1 2 8 2 2 8 3 2 8 4 3 1 3 2 3 2 1 3 2 2 3 2 3 3 2 4 3 2 5 3 2 6 3 3 3 4 3 5 3 6 3 7 3 8 Important Safety Information Description Design Standard equipment Technical data Ordering data Accessories Installation Conform