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1. Initial Wafer Clean

Initial Wafer Clean http mitghmr spd louisville edu lutz resources sops sop62 html 1 of 2 Sop 62 Title Filmetrics Thin Film Measurement System v 1 5 reviewed by Chris Foreman on 11 Sep 1998 Purpose This SOP outlines the startup use and shutdown of the Filmetrics system attached to the cleanroom PC Measurements may be made with the base unit or with the microscope attachment For specific details a user manual is located in the cleanroom near the Filmetrics system
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15. Initial Wafer Clean

Initial Wafer Clean http mitghmr spd louisville edu lutz resources sops sop62 html 1 of 2 Sop 62 Title Filmetrics Thin Film Measurement System v 1 5 reviewed by Chris Foreman on 11 Sep 1998 Purpose This SOP outlines the startup use and shutdown of the Filmetrics system attached to the cleanroom PC Measurements may be made with the base unit or with the microscope attachment For specific details a user manual is located in the cleanroom near the Filmetrics system
PDF Manual ENGLISH
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