| # | Title | Type | Language | |||||||||||
| 1. | sheet E 110A ams01447 doc Edition 03 May 06 E 110A Dry plasma chamber cleaning Preliminary condition e Once a cleaning procedure has been requested and the machine has completed all the etching processes you can start a dry plasma cleaning procedure Tools required e Oxygen gas supplied to the O2 gas line of the machine e Optional an optical emission spectroscopic system e Dummy Si water Select a plasma cleaning process in the process library Inthe System |
PDF Manual | ENGLISH | |||||||||||
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