ALCATEL VACUUM TECHNOLOGY ADP ADS Series Two DRY PUMPS FOR THE SEMICON DUCTOR IN DUSTRY User s Manual y ee oy ee Edition O2 February 99 Dear Customer you have just purchased an Alcatel dry pump We thank you and are proud to include you in our customers This product has benefited from Alcatel s many years of experience in semi conductor processes and dry pumping For optimum performance and to obtain full satisfac
Edition 04 May 98 load DOWMOaded fF Q0 On Tdeat vacuum products a p 505 872 0037 PLEASE NOTE We do sell the related products within this literature but we are not connected in any way with the manufacture of your product We provide this literature for the products we sell and service They are intended to provide users with the manufactures instructions to operate the equipment in a safe manner www idealvac com CONTENTS ADP ADS