Electrode position controller for a semiconductor etching device

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1. Electrode position controller for a semiconductor etching device

United States Patent Smesny et al 54 75 73 21 22 51 52 58 56 ELECTRODE POSITION CONTROLLER FOR A SEMICONDUCTOR ETCHING DEVICE Inventors Greg A Smesny Roger A Sikes both of Austin Michael R Conboy Buda all of Tex Assignee Advanced Micro Devices Inc Sunnyvale Calif Appl No 33 025 Filed Mar 18 1993 Int 01 5 00 HOIL 21 00 17 5 Oeae 156 627 156 643 156 345 204 298 32 Field of Search
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