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1. PROCEDURES FOR DEVELOPMENT RATE

PROCEDURES FOR DEVELOPMENT RATE MEASUREMENT DRM 1 0 2 0 VERSION 3 DEE 09 2002 Microlithography Materials and Processes Laboratory EMCR676 751 Microelectronic Engineering Department Rochester Institute of Technology Materials Required 1 1 Bare Silicon Wafer Preparation of Wafer 2 1 2 2 2 3 2 4 25 Dehydration Bake 2 minutes 250 C on contact hot plate If you are coating HMDS onto wafer 1 Coat HMDS onto wafer 2 HMDS bake 90
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