d Digital Veeco i Instruments Metrology Group Support Note 31 6 Revision A NanoLithography 316 1 Overview This support note details NanoLithography theory NanoScript syntax for performing lithography commands and procedures to test build and run NanoLithography programs Refer to the following sections for using your NanoLithography Package e New NanoLithography Package Section 316 2 on Page 2 e Package Contents Section 316 2 1 on Page 2 e Terms and Defin
IM THERMOMICROSCOPES Nanolithography for Explorer v 1 0 Software User s Manual ThermoMicroscopes 1171 Borregas Avenue Sunnyvale California 94089 Tel 408 747 1600 Fax 408 747 1601 Binary License Agreement You the Licensee assume responsibility for the selection of the program to achieve your intended results and for the installa tion use and results obtained from the program IF YOU USE COPY MODIFY OR TRANSFER THE PROGRAM OR ANY COPY MODIF