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1. Phase modulating interferometry with stroboscopic illumination for

Phase modulating interferometry with stroboscopic illumination for characterization of MEMS A Thesis submitted to the faculty of the Worcester Polytechnic Institute as a partial fulfillment of the requirements for the Degree of Master of Science in Mechanical Engineering by Matthew T Rodgers 15 December 2006 L HE i Ee Cosme FA es Majors Beet E AG VLMa Prof Ry Gh Rey hutiew ez Member Thesis Committee PAEA AAA Prof Gfetar oe Meunier The
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