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1. space 3d capacitance extraction user`s manual

SPACE 3D CAPACITANCE EXTRACTION USER S MANUAL A J van Genderen N P van der Meijs Department of Electrical Engineering Delft University of Technology The Netherlands Report ET NT 94 37 Copyright 1994 1999 by the authors All rights reserved Last revision Aug 1999 Space 3D Capacitance Extraction 1 1 Introduction 1 1 3D Capacitance Extraction Parasitic capacitances of interconnects in integrated circuits become more important as the feature sizes
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