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1. VarioS&reg;-Microscanner user manual - Scanner pdf VarioS&reg;-Microscanner user manual - Scanner

Y ZA Fraunhofer IPMS FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS IPMS USER MANUAL VarioS Microscanner Demonstrators last revision 2014 11 14 Fb046 08 USER MANUAL doc Introduction Thank you for purchasing a VarioS microscanner demonstrator from Fraunhofer IPMS Fraunhofer IPMS has a long and successful track record in developing and fabricating customized highly miniaturized resonantly operated MEMS scanners Devices feature large scan angles hi
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