DektakXT Stylus Profilometer User Instructions MMRC GLAs Emily Warren ewarren caltech edu and Heather Audesirk haudesir caltech edu Document Updated 4 16 2012 These basic instructions are for general use of the DektakXT profilometer The full user guide can be found on the desktop of the control computer How the system works The DektakXT system takes measurements electromechanically by moving a diamond tipped stylus over the sample surface according to a user program
Y Adjustment Veeco Dektak 6M Surface Profiler POC Stephan Koev SYSTEM CHECK AND START UP 1 Turn on the monitor and start the Dektak32 application on the Desktop 2 The system will initialize itself and will let you know when it is ready in the bottom left corner of the screen LOADING UNLOADING A SAMPLE 1 Load your sample on the positioning stage 2 3 4 5 NOTE The profiler is set up such that the scan is performed from front to back on
Dektak 150 Stylus Surface Profiler Operation Manual Note To abort a Dektak 150 operation press the Esc or A key on the keyboard The stylus is very expensive take caution when you load and unload your samples START UP 1 Double click the Dektak icon to start the Dektak 150 software SAMPLE LOADING 1 Open the enclosure 2 Verify that the tower is raised 3 Position the sample in the center of the stage right below the stylus DEFINING SCAN LOCATION and LENGTH
p a m Dektak XT Surface Profiler System Overview e The Dektak XT surface profiler is an advanced thin and thick film step height measurement tool e In addition to profiling surface topography and waviness the Dektak XT system measures roughness in the nanometer range e The system can produce three dimensional measurements and analyses when equipped with the 3D Mapping Option How to get started e Release the EMO knob by rotating it clockwise