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1. User Manual DT-80 R - Physik Instrumente (PI) pdf User Manual DT-80 R - Physik Instrumente (PI)

DT 80 R Rotation Stage 01 1 Order no 6450 9 b b h DT 80 R Rotation Stage 1 Order no 6450 9 DC B 013 2 User manual Version 00 000 Date 31 07 2015 PI muitos 02 2 DT 80 R Rotation Stage 2012 Pl miCos GmbH Eschbach Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Pi miCos GmbH retains all rights The use of any text images and drawings is permitted only in part and only when indicating the sou
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2. User Manual MP100E - Physik Instrumente pdf User Manual MP100E - Physik Instrumente

PI MP100E M 687 UN XY Stage User Manual Version 1 1 0 Date 14 02 2014 This document describes the following product M 687 UN XY Microscope Stage for Inverted Nikon Microscopes 135 mm x 85 mm Self Locking PlLine Linear Drives 0 1 um Linear Encoder Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany ___ Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Phy
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3. User Manual MP102E - Physik Instrumente pdf User Manual MP102E - Physik Instrumente

PI MP102E M 230 Linear Actuators User Manual Version 1 1 1 Date 09 12 2013 This document describes the following Y linear actuators with limit switches LE M 230 10 DC Drive 10 mm Travel Range es High Resolution M 230 25 DC Drive 25 mm Travel Range High Resolution M 230 10S Stepper Motor Drive 10 mm Travel Range High Resolution M 230 25S Stepper Motor Drive 25 mm Travel Range High Resolution M 230 10V DC Drive 10 mm Travel Range Vacu
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4. User Manual MP104E - Physik Instrumente pdf User Manual MP104E - Physik Instrumente

PI MP104E M 231 Linear Actuators User Manual Version 1 1 0 Date 22 10 2012 This document describes the following high resolution linear actuators with limit switches pe M 231 17 DC Drive Travel Range 17 mm M 231 17S Stepper Motor Drive Travel Range 17 mm Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI
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5. User Manual MP105E - Physik Instrumente pdf User Manual MP105E - Physik Instrumente

PI MP105E M 232 Linear Actuator User Manual Version 1 1 0 Date 22 10 2012 This document describes the following high resolution linear actuators with limit switches M 232 17 DC Drive Travel Range 17 mm M 232 17S Stepper Motor Drive Travel Range 17 mm Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW P
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6. User Manual MP106E - Physik Instrumente pdf User Manual MP106E - Physik Instrumente

MP106E M 235 Linear Actuators User Manual Version 1 1 0 Date 22 10 2012 PI This document describes the following high load precision linear actuators with recirculating ball screws M 235 22S Travel Range 20 mm Stepper Motor M 235 2DD Travel Range 20 mm DC Direct Drive M 235 2DG Travel Range 20 mm DC Gear Motor M 235 2VD Travel Range 20 mm DC Direct Drive Vacuum Compatible M 235 2VG Travel Range 20 mm DC Gear Motor Vacuu
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7. User Manual MP107E - Physik Instrumente pdf User Manual MP107E - Physik Instrumente

PI MP107E M 687 UO XY Stage User Manual Version 1 1 0 Date 14 02 2014 This document describes the following product M 687 U0 XY Microscope Stage for Inverted Olympus Microscopes 100 mm x 75 mm Self Locking PlLine Linear Drives 0 1 um Linear Encoder Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany _ Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI
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8. User Manual MP113E - Physik Instrumente pdf User Manual MP113E - Physik Instrumente

MP113E M 5x1 Stages User Manual Version 1 0 0 Date 25 09 2013 PI This document describes the following micropositioning stages M 5x1 DD1 with ActiveDrive DC motor PWM linear encoder M 5x1 DD2 with ActiveDrive DC motor PWM linear encoder motor brake M 5x1 DG1 with DC gear motor rotary encoder M 5x1 EC with brushless DC motor rotary encoder M 5x1 PD1 with ActiveDrive DC motor PWM rotary encoder M 5x1 PG1 with DC gear motor PWM rot
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9. User Manual MP117E - Physik Instrumente pdf User Manual MP117E - Physik Instrumente

PI MP117E N 664 NEXACT Stage User Manual Version 1 0 1 Date 18 11 2013 This document describes the following product N 664 3A Ultra High Precision Linear Positioning System with NEXACT Piezo Drive 30 mm PlOne Linear Encoder 0 5 nm Resolution Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany __ Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI
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10. User Manual MP118E - Physik Instrumente pdf User Manual MP118E - Physik Instrumente

MP118E LPS 24 Miniature Positioner User Manual Date 23 05 2014 Version 1 1 0 PI This document describes the following products 5862 9 1110 LPS 24 Miniature Linear Positioner 15 mm 150 nm Resolution 5862 9 1230 LPS 24 Miniature Nanopositioner 15 mm 0 5 nm Resolution 5862 V 1120 LPS 24 Miniature Linear Positioner 15 mm 20 nm Resolution Vacuum Compatible to 10 hPa 5862 V 1230 LPS 24 Miniature Nanopositioner 15 mm 0 5 nm Resolution Vacuum
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11. User Manual MP123E - Physik Instrumente pdf User Manual MP123E - Physik Instrumente

PI MP123E M 406 Stage User Manual Version 1 3 0 Date 21 07 2014 This document describes the following micropositioning stages M 406 xDG With DC motor rotary encoder M 406 xPD With ActiveDrive DC motor PWM rotary encoder M 406 x2S With 2 phase stepper motor x stands for travel range 2 50 mm 4 100 mm 6 150 mm Physik Instrumente PI GmbH 8 Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 48
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12. User Manual MP124E - Physik Instrumente pdf User Manual MP124E - Physik Instrumente

PI MP124E V 273 VC Linear Actuator User Manual Version 1 0 0 Date 30 03 2015 This document describes the following products V 273 430 i PIMag Voice Coil Linear Actuator j 20 mm 6 N Linear Encoder D 0 1 um Resolution V 273 431 PIMag Voice Coil Linear Actuator 20 mm 6N Linear Encoder 0 1 um Resolution Force Sensor Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49
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13. User Manual MP126E - Physik Instrumente pdf User Manual MP126E - Physik Instrumente

PI MP126E M 417 Stage User Manual Version 1 0 0 Date 25 06 2014 This document describes the following stage M 417 2PD Linear Translation Stage with Recirculating Ballscrew Travel Range 500 mm ActiveDrive DC Motor Includes 24 V Power Supply Physik Instrumente PI GmbH amp Co KG Auf der Roemersir 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik
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14. User Manual MP128E - Physik Instrumente pdf User Manual MP128E - Physik Instrumente

PI MP128E Q 622 Miniature Rotation Stage User Manual Version 1 0 0 Date 24 02 2015 This document describes the following product Q 622 900 Q Motion Rotation Stage gt 360 Rotation Range without Position Sensor for Open Loop Operation 5 mNm Torque 22 mm Turntable Diameter Piezoelectric Inertia Drive Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info
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15. User Manual MP129E - Physik Instrumente pdf User Manual MP129E - Physik Instrumente

PI MP129E Q 632 Miniature Rotation Stage User Manual Version 1 0 0 Date 24 02 2015 This document describes the following product Q 632 900 Q Motion Rotation Stage gt 360 Rotation Range without Position Sensor for Open Loop Operation 6 mNm Torque 30 mm Turntable Diameter Piezoelectric Inertia Drive Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info
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16. User Manual MP130E - Physik Instrumente pdf User Manual MP130E - Physik Instrumente

PI MP130E N 765 NEXACT Stage User Manual Version 1 0 0 Date 29 07 2015 This document describes the following product N 765 060 Precision Z Stage 6 5 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 25 N Push Pull Force Dimensions 65 x 110 x 56 mm W x L x H Piezoelectric Stepping Drive NEXACT Physik Instrumente GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail in
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17. User Manual MP134E - Physik Instrumente pdf User Manual MP134E - Physik Instrumente

PI MP134E Q 522 Miniature Stage User Manual Version 1 0 0 Date 24 02 2015 This document describes the following products Q 522 xyz Q Motion Miniature Linear Stage Piezoelectric Inertia Drive x Travel range 0 6 5mm 1 13 mm 2 26 mm y Equipment with a sensor 0 without sensor 4 with sensor z Suitable for vacuum O suitable to 0 1 hPa U suitable to 10 hPa Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruh
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18. User Manual MP136E - Physik Instrumente pdf User Manual MP136E - Physik Instrumente

PI MP136E U 651 Rotation Stage User Manual Version 1 0 0 Date 21 08 2015 This document describes the following products U 651 03 PlLine rotation stage 0 3 Nm torque incremental encoder 9 urad resolution Sub D connector U 651 03V PlLine rotation stage 0 3 Nm torque incremental encoder 9 urad resolution Sub D connector vacuum compatible to 10 hPa U 651 04 PlLine rotation stage 0 3 Nm torque incremental encoder 4 urad resolution
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19. User Manual MP142E - Physik Instrumente pdf User Manual MP142E - Physik Instrumente

PI MP142E N 111 NEXLINE Linear Actuator User Manual Version 1 0 0 Date 15 06 2015 This document describes the following products N 111 201 NEXLINE OEM Piezo Stepping Actuator 10 mm 50 N N 111 2A1 NEXLINE OEM Piezo Stepping Actuator 10 mm 50 N Linear Encoder 5 nm Resolution Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZ
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20. User Manual MP148E - Physik Instrumente pdf User Manual MP148E - Physik Instrumente

PI MP148E N 565 NEXACT Stage User Manual Version 1 0 0 Date 27 08 2015 This document describes the following products N 565 160 Precision Linear Stage 13 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 80 x 20 mm W x L x H Piezoelectric Stepping Drive NEXACT N 565 260 Precision Linear Stage 26 mm Travel Range PlOne Linear Encoder 0 5 nm Resolution 10 N Push Pull Force Dimensions 65 x 110 x 20 mm
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21. User Manual MP34E - Physik Instrumente pdf User Manual MP34E - Physik Instrumente

Piezo Nano Positioning PI MP 34E User Manual MI O 3 Sf M O 3 Worm Gear Rotation Stages Release 3 7 1 Date 2007 08 24 This document describes the following product s gt S E M 037 00 E 60 mm manual drive E M 037 DG 60 mm DC motor gearhead E M 037 PD 60 mm PWM DC motor direct drive E M 037 2S 60 mm 2 phase stepper motor drive open loop E M 038 001 100 mm manual drive E M 038 DG1 M 038 VG1 100 mm DC motor gearhead E M 038 VG1 M 038 VP1 100
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22. User Manual MP35E - Physik Instrumente pdf User Manual MP35E - Physik Instrumente

Piezo Nano Positioning PI MP 35E User Manual M 405 M 410 M 415 Series Linear Positioning Stages Release 3 3 3 Date 2008 03 17 This document describes the following product s E M 405 DG M 410 DG M 415 DG Linear Positioning Stages DC Motor gearhead E M 405 CG M 410 CG M 415 CG Linear Positioning Stages DC Motor gearhead E M 405 PD M 410 PD M 415 PD Linear Positioning Stages with integrated amplifier PWM E M 405 2S M 410 2S M 415 2S Linear
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23. User Manual MP41E - Physik Instrumente pdf User Manual MP41E - Physik Instrumente

PI MP41E M 11x Micro translation stage User Manual Version 4 0 0 Date 15 03 2011 This document describes the following products M 11x 1DG Translation Stage DC Motor Gearhead 11 20 Translation Stage DC Motor Gearhead Recirculating Ballscrew 11 12 Translation Stage Stepper Motor 11 22 Translation Stage Stepper Motor Recirculating Ballscrew x stands for travel range 0 5mm 1 15mm 2 25 Physik Instrumente
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24. User Manual MP42E - Physik Instrumente pdf User Manual MP42E - Physik Instrumente

Piezo Nano Positioning PI MP 42E User Manual M 126 Series Linear Positioning Stages Release 2 7 0 Date 2008 04 24 This document describes the following products E M 126 M01 Linear Positioning Stage manual operation E M 126 CG1 Linear Positioning Stages DC Motor gearhead compact design E M 126 DG1 Linear Positioning Stages DC Motor gearhead E M 126 PD1 M 126 PD2 Linear Positioning Stages DC Motor direct drive E M 126 2S1 Linear Positioning Stages st
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25. User Manual MP44E - Physik Instrumente pdf User Manual MP44E - Physik Instrumente

Piezo Nano Positioning PI MP 44E User Manual M 505 Linear Positioning Stages Release 1 1 3 Date 2006 03 10 This document describes the following product s B M 505 xxx Linear Positioning Stages De 13 amd cM ee 4 E EL Physik Instrumente PI GmbH amp KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www
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26. User Manual MP45E - Physik Instrumente pdf User Manual MP45E - Physik Instrumente

Piezo Nano Positioning PI MP 45E User Manual M 605 Linear Positioning Stages Release 1 1 0 Date 2005 01 05 This document describes the following product s E M 605 1DD Translation Stage 25 mm 0 1um Linear Scale ActiveDrive DC Motor E M 605 2DD Translation Stage 50 mm 0 1um Linear Scale ActiveDrive DC Motor Th ed ee Ee ST nee st meg a rr ft E IFI aml paenneet iTi Physik Instrumente PI GmbH amp Co KG Auf der R
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27. User Manual MP55E - Physik Instrumente pdf User Manual MP55E - Physik Instrumente

Technical Documentation PI MP 55E User Manual M 451 Vertical Positioning Stages Release 1 1 0 Product Description and Operating Notes This document is valid for the products M 451 1DG Vertical MicroPositioning Stage 12 5 mm DC Motor Gearhead M 451 1PD Vertical MicroPositioning Stage 12 5 mm ActiveDrive DC Motor M 451 12S Vertical MicroPositioning Stage 12 5 mm Stepper Motor Release 1 1 0 Release Date 2004 06 23 Physik Instrumente PI Gmb
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28. User Manual MP61E - Physik Instrumente pdf User Manual MP61E - Physik Instrumente

Piezo Nano Positioning PI MP61E User Manual M 122 Micro Translation Stage Release 1 0 0 Datum 01 08 2007 This document describes the following product m M 122 2DD High Precision Micro Translation Stage with linear encoder Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 I info pi ws www pi ws Moving the NanoWorld www pi ws Physik Instrumente PI GmbH amp Co
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29. User Manual MP73E - Physik Instrumente pdf User Manual MP73E - Physik Instrumente

Piezo gt Nano Positioning PI MP 73E User Manual M 403Linear Translation Stages Release 2 0 1 Date 25 04 2007 This document describes the following product s m M 403 xDG Linear Translation Stage DC Motor M 403 xPD Linear Translation Stage ActiveDrive M 403 x2S Linear Translation Stage Stepper Motor Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299
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30. User Manual MP77E - Physik Instrumente pdf User Manual MP77E - Physik Instrumente

Piezo Nano Positioning PI MP 77E User Manual M 238 Heavy Duty DC Mike Actuator Release 1 0 0 Date 02 08 2006 This document describes the following product s BH M 238 5PL Heavy Duty DC Mike Actuator Linear Encoder B M 238 5PG Heavy Duty DC Mike Actuator Rotary Encoder Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws E ud i
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31. User Manual MP84E - Physik Instrumente pdf User Manual MP84E - Physik Instrumente

Piezo Nano Positioning PI MP84E User Manual M 51 1 HD Ultra High Resolution Positioner Release 1 0 0 Date 2008 02 27 This document describes the follovving product E M 511 HD Ultra High Resolution Positioning Stage vvith Hybrid Drive Pi Hybrid O Physik Instrumente PI GmbH 8 Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of
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32. User Manual MP99E - Physik Instrumente pdf User Manual MP99E - Physik Instrumente

PI MP99E M 683 Linear Stage User Manual Version 1 4 0 Date 04 06 2014 This document describes the following products M 683 2U4 PILine High Speed Linear Stage 50 mm 6N M 683 2V4 PILine High Speed Linear Stage 50 mm 6 N Vacuum Compatible to 10 hPa Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING W
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33. User Manual MS114E - Physik Instrumente pdf User Manual MS114E - Physik Instrumente

MS114E C 809 Motion I O Interface User Manual Version 1 2 0 Date 10 11 2014 This document describes the following product C 809 40 Motion I O Interface for Operating PI Stages with National Instruments PCI 7344 Motion Control Card Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWIW PI WS Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PI Physik Instrum
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34. User Manual MS198E - Physik Instrumente pdf User Manual MS198E - Physik Instrumente

MS198E H 810 Hexapod Microrobot User Manual Version 1 2 0 Date 03 06 2013 This document describes the following product H 810 D1 Miniature Hexapod Microrobot Direct Drive 2 5 mm s 5 kg Load 2 m Cable Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the
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35. User Manual MS199E - Physik Instrumente pdf User Manual MS199E - Physik Instrumente

PI MS199E H 811 Hexapod Microrobot User Manual Version 1 1 0 Date 04 06 2013 This document describes the following products H 811 D1 Miniature Hexapod Microrobot Direct Drive 10 mm s 5 kg Load 2 m Cable H 811 DV Miniature Hexapod Microrobot Direct Drive 10 mm s 5 kg Load Vacuum Compatible to 10 hPa 2 m Vacuum Side Cable Feedthrough 3 m Air Side Cable Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany
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36. User Manual MS200E - Physik Instrumente pdf User Manual MS200E - Physik Instrumente

MS200E H 824 Hexapod Microrobot User Manual Version 1 2 0 Date 04 06 2013 PI This document describes the following products H 824 G1 Compact Hexapod Microrobot DC Motor Gearhead 1 mm s 10 kg Load H 824 GV Compact Hexapod Microrobot DC Motor Gearhead 0 5 mm s 5 kg Load Vacuum Compatible to 10 hPa H 824 D1 Compact Hexapod Microrobot Direct Drive 25 mm s 5 kg Load H 824 DV Compact Hexapod Microrobot Direct Drive 12 5 mm s 2 5 kg Load Va
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37. User Manual MS201E - Physik Instrumente pdf User Manual MS201E - Physik Instrumente

MS201E H 840 Hexapod Microrobot User Manual Version 1 1 0 Date 04 06 2013 This document describes the following products H 840 G1 Hexapod Microrobot DC Motor Gearhead 2 5 mm s 30 kg Load H 840 D1 Hexapod Microrobot Direct Drive 50 mm s 10 kg Load Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS P
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38. User Manual MS211E - Physik Instrumente pdf User Manual MS211E - Physik Instrumente

PI MS211E C 872 PILine Electronics User Manual Version 2 1 0 Date 23 10 2013 This document describes the following product m C 872 160 Piezomotor Drive Electronics for PILine Systems Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH 8 Co KG is the owner of the followi
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39. User Manual MS222E - Physik Instrumente pdf User Manual MS222E - Physik Instrumente

MS222E H 845 D11 Modular Hexapod System User Manual Version 1 1 0 Date 23 10 2013 This document describes the following product H 845 D11 Modular Hexapod System with Direct Drive 50 mrad s 1000 kg Load Including Power Supply Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI
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40. User Manual PLS-85 - Physik Instrumente pdf User Manual PLS-85 - Physik Instrumente

A PLS 85 Precision Linear Stage 1 Dai 6234 9 1 DC B 032 2Phase 045 3 meyer 4 PLS 85 Precision Linear Stage Order no 6234 9 26 mm 1 0 52 mm 2 1 User Manual Version 00 000 Date 31 07 2015 102 mm 4 2 155 mm 6 3 without LS 012 0 LS 012 length measuring system 1 Pitch 1 mm limit switch mechanical 0 Pitch 2 mm limit switch mechanical 1 Pitch 1 mm limit switch Hall effect 2 Pitch 2 mm limit switch Hall effect 3 PImic
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41. User Manual PZ115E - Physik Instrumente pdf User Manual PZ115E - Physik Instrumente

Piezo Nano Positioning PI PZ115E User Manual E 621 LVPZT Controller Amplifier Module Release 2 2 0 Date 2009 04 20 This document describes the following product s E E 621 SR LVPZT Controller Amplifier Single Channel for Strain Gauge Sensors E E 621 LR LVPZT Controller Amplifier Single Channel for LVDT Sensors All models with servo control and computer interface and command interpreter submodules as standard Capacitive sensor E 621 versions are des
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42. User Manual PZ117E - Physik Instrumente pdf User Manual PZ117E - Physik Instrumente

Piezo Nano Positioning PI PZ 117E User Manual E 3 O 1 Sensor Submodule Release 1 6 0 Date 2010 11 22 E E 801 10 Excitation and Readout Submodule for SGS Sensor E E 801 15 Excitation and Readout Submodule for SGS Sensor E E 801 20 Excitation and Readout Submodule for LVDT Sensor E E 801 25 Excitation and Readout Submodule for LVDT Sensor Master E E 801 26 Excitation and Readout Submodule for LVDT Sensor Slave E E 801 30 Excitation and Readout Submodul
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43. User Manual PZ125E - Physik Instrumente pdf User Manual PZ125E - Physik Instrumente

Technical Documenta User Manual PZ 125E S 334 Tip Tilt Mirror Release 1 10 Product Description and Operating Notes This Document is valid for the following Products 334 2SL Piezo Tip Tilt Mirror 25 mrad Closed Loop Release 1 10 Release Date 2003 06 05 Physik Instrumente P I GmbH amp Co KG 76228 Karlsruhe Germany FAX 49 721 4846 299 E Mail info pi ws Internet www pi ws S 334 XY Tip Tilt Mirror User Manual PZ 125E Table of Content
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44. User Manual PZ127E - Physik Instrumente pdf User Manual PZ127E - Physik Instrumente

PZ127E User Manual Piezo Nano Positioning PI E 665 LVPZT controller Amplifier Release 1 7 0 Date 2015 07 13 SS AAAS SSS TS AAAS Moving the NanoWorld www pi ws This doc ument describes the following products E E 665 SR LVPZT Controller Single Channel for Strain Gauge Sensor E E 665 CR LVPZT Controller Single Channel for Capacitive Sensor Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Ger
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45. User Manual PZ138E - Physik Instrumente pdf User Manual PZ138E - Physik Instrumente

PI PZ138E P 0xx Piezo Actuator User Manual Version 1 2 0 Date 10 12 2014 This document describes the following products P P 007 P 056 PICA Stack piezo actuators travel range to 300 um P 010 xxP P 056 xxP PICA Power piezo actuators travel range to 180 um P 010 xxH P 025 xxH PICA Thru ring actuators travel range to 80 um x stands for the different models This document also applies to custom products of the following product lines PIC
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46. User Manual PZ143E - Physik Instrumente pdf User Manual PZ143E - Physik Instrumente

Piezo Nano Positioning PI PZ 143E User Manual E 841 E 842 LVPZT Power Supply Modules Release 1 3 0 Date 2012 01 16 This document describes the following product s 41 05 Power Supply Module 8 W Input 10 to 30 V PI No E 841 05 SN 5000102 Vin 10 30 V E E 841 55 EEE Power Supply Module 20 W Input 12 to 30 V E E 842 05 Power Supply Module 8 W Input 30 to 72 V O Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karl
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47. User Manual PZ149E - Physik Instrumente pdf User Manual PZ149E - Physik Instrumente

Piezo Nano Positioning PI PZ 149E User Manual S 330 Tip Tilt Platform Release 1 1 0 Date 2007 07 24 This document describes the following product s E S 330 2SL S 330 4SL S 330 8SL High dynamics piezo tip tilt platforms SGS LEMO connector travel 2 5 and 10 mrad respectively E S 330 2SD S 330 4SD S 330 8SD High dynamics piezo tip tilt platforms SGS Sub D connector travel 2 5 and 10 mrad respectively E S 330 20L S 330 40L S 330 80L High dynamics
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48. User Manual PZ150E - Physik Instrumente pdf User Manual PZ150E - Physik Instrumente

Piezo Nano Positioning PI PZ 150E User Manual E 802 Servo Controller Submodule Release 1 4 0 Date 2013 11 08 This document describes the following Product s B E 802 55 Servo Controller Submodule Revision ADC or higher Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 1019 Moving the NanoWorld www pi ws info pi ws www pi ws E 802 55 Servo Control Submodule User M
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49. User Manual PZ160E - Physik Instrumente pdf User Manual PZ160E - Physik Instrumente

Piezo Nano Positioning PI PZ160E User Manual E 621 CR LVPZT Controller Amplifier Module Release 2 3 0 Date 2010 08 13 This document describes the following product s E E 621 CR LVPZT Controller Amplifier Single Channel for Capacitive Sensors With servo control and computer interface and command interpreter submodules as standard Strain gauge and LVDT sensor E 621 versions are described in a separate manual PZ115E Physik Instrumente Pl GmbH
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50. User Manual PZ176E - Physik Instrumente pdf User Manual PZ176E - Physik Instrumente

Positioning P I Piezo Nano PZ176E User Manual E 464 PICA HVPZT Piezo Amplifier Release 1 0 1 Date 10 07 2007 This document describes the following product m E 464 00 PICA HVPZT Piezo Amplifier 3 Channels Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws i SC 2 info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG
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51. User Manual PZ178E - Physik Instrumente pdf User Manual PZ178E - Physik Instrumente

Piezo Nano Positioning PI PZ178E User Manual E 421 E 470 E 471 E 472 HVPZT Piezo Power Amplifier Controller Release 1 1 0 Date 23 10 2012 This document describes the following product s B E 421 00 HVPZT Piezo Power Amplifiermodule 1 Channel B E 470 20 HVPZT Piezo Power Amplifier Controller 1 Channel Benchtop B E 471 20 HVPZT Piezo Power Amplifier Controller 1 Channel 19 B E 472 20 HVPZT Piezo Power Amplifier Controller 2 Channels E 9
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52. User Manual PZ199E - Physik Instrumente pdf User Manual PZ199E - Physik Instrumente

Piezo Nano Positioning PI PZ199E User Manual E 244 1 Piezo Amplifier Release 1 0 2 Date 2008 01 18 This document describes the following product s E 413 00 Piezo Amplifier for PICA Shear Actuators 250 to 250 V Bench Top E E 413 0E Piezo Amplifier for PICA Shear Actuators 250 to 250 V OEM Module E E 413 D2 Piezo Amplifier for DuraAct Piezoceramic Transducers 100 to 400 V Physik Instrumente PI GmbH amp Co KG Auf
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53. User Manual PZ200E - Physik Instrumente pdf User Manual PZ200E - Physik Instrumente

Piezo Nano Positioning PI PZ200E User Manual E 616 SSO E 616 S0 OEM Controller for Piezo Multi Axis Tip Tilt Platforms Release 1 0 2 Date 4 09 2009 This document describes the following products m E 616 SSO Multi Channel Servo Controller Module for Piezo Tip Tilt Platforms with SGS and Based on Differential Drive m E 616 S0 Multi Channel Servo Controller Module for Piezo Tip Tilt Platforms with SGS and Based on Tripod Drive Physik Inst
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54. User Manual PZ210E - Physik Instrumente pdf User Manual PZ210E - Physik Instrumente

Piezo Nano Positioning PI PZ210E User Manual E 462 Piezo Amplifier Release 1 1 0 Date 20 July 2011 This document describes the following products E E 462 00 HVPZT Piezo Amplifier 10 to 1000 V Bench Top E E 462 0E1 HVPZT Piezo Amplifier Module 10 to 1000 V OEM Version Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany WS info pi ws www pi ws Physik Instrumente PI GmbH
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55. User Manual PZ211E - Physik Instrumente pdf User Manual PZ211E - Physik Instrumente

Piezo Nano Positioning PI PZ211E User Manual E C3 3 5 Piezo Driver Module Release 1 0 0 Date 2008 07 24 This document describes the following product B F 835 00 OEM Piezo Amplifier for DuraAct Patch Transducer O Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Conformity The E 835 OEM Module is intended
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56. User Manual PZ234E - Physik Instrumente pdf User Manual PZ234E - Physik Instrumente

PI PZ234E P 62x Positioning Systems User Manual Version 1 0 1 Date 15 07 2014 This document describes the following products P 620 P 621 P 622 P 625 P 628 P 629 PlHera piezo linear stage P 620 1CD 1CL 10L 1UD P 621 1CD 1CL 10L 1UD P 622 1CD 1CL 10L 1UD P 625 1CD 1CL 10L 1UD P 628 1CD 1CL 10L 1UD P 629 1CD 1CL 10L 1UD P 620 P 621 P 622 P 625 P 628 P 629 PlHera piezo XY stage P 620 2CD 2CL 20L 2UD P 621 2CD 2CL 20L 2UD
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57. User Manual PZ244E - Physik Instrumente pdf User Manual PZ244E - Physik Instrumente

PZ244E P 54x Nanopositioners User Manual Version 1 0 0 Date 21 03 2013 PI This document describes the following products P 541 XY nanopositioning system with large clear aperture P 541 20L 100 um x 100 um without sensors P 541 2CD 2CL 100 um x 100 um capacitive sensors P 541 2SL 100 um x 100 um strain gauge sensors P 541 2DD 45 um x 45 um direct drive capacitive sensors P 542 XY nanopositioning system with large clear aperture P 542 20
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58. User Manual PZ248E - Physik Instrumente pdf User Manual PZ248E - Physik Instrumente

PZ248E P 56x Nanopositioners User Manual Version 1 0 0 Date 22 11 2013 PI This document describes the following products P 561 PiMars XYZ Nanopositioning System P 561 3CD 3CL 100 um x 100 um x 100 um P 561 3DD 45 um x 45 um x 15 um Direct Drive P 562 PiMars XYZ Nanopositioning System P 562 3CD 3CL 200 um x 200 um x 200 um P 563 PiMars XYZ Nanopositioning System P 563 3CD 3CL 300 um x 300 um x 300 um 3CD 3DD with Sub D connector 3CL with LEMO
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59. User Manual PZ249E - Physik Instrumente pdf User Manual PZ249E - Physik Instrumente

PZ249E P 21x Piezo Actuator User Manual Version 1 0 1 Date 02 03 2015 PI This document describes the following products P 212 Preloaded Piezo Actuator P 212 10 20 40 80 without sensor P 212 10V 20V 40V 80V without sensor high temperature range and high vacuum P 212 1S 2S 4S 8S with sensor P 212 1SV 2SV 4SV 8SV with sensor high temperature range and high vacuum P 216 Preloaded Piezo Actuator P 216 10 20 40 80 90 without sensor P 216
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60. User Manual PZ253 - Physik Instrumente pdf User Manual PZ253 - Physik Instrumente

PZ253E PI P 611 Positioning Systems User Manual Version 1 0 0 Date 24 07 2014 PIEZO NANO POSITIONING WWW PI WS This document describes the following products P 611 1 Linear Piezo Positioning System P 611 1S 10 P 611 XZ P 611 2 XZ and XY Nanopositioner P 611 2S 20 XZS XZO P 611 3 NanoCube XYZ Piezo Stage P 611 3S 3SF 30 30F P 611 Z Piezo Z Stage P 611 ZS Z0 1S 10 2S 20 XZS XZ0 ZS Z0 with LEMO connector
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61. User Manual PZ254E - Physik Instrumente pdf User Manual PZ254E - Physik Instrumente

PI PZ254E P 753 Positioning Systems User Manual Version 1 0 0 Date 13 10 2014 This document describes the following products P 753 11C P 753 1CD LISA High Dynamics Piezo Nanopositioning System 12 um Direct Metrology Capacitive Sensor P 753 21C P 753 2CD LISA High Dynamics Piezo Nanopositioning System 25 um Direct Metrology Capacitive Sensor P 753 31C P 753 3CD LISA High Dynamics Piezo Nanopositioning System 38 um Direct Metrology Ca
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62. User Manual PZ255E - Physik Instrumente pdf User Manual PZ255E - Physik Instrumente

PI PZ255E S 334 Piezo Tip Tilt Mirror User Manual Version 1 0 1 Date 19 09 2014 This document describes the following products 334 2SD1 High Dynamics Piezo Tip Tilt Platform 50 mrad SGS Sub D Connector incl Mirror 334 2SL1 High Dynamics Piezo Tip Tilt Platform 50 mrad SGS LEMO Connectors incl Mirror Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846
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63. User Manual PZ258E - Physik Instrumente pdf User Manual PZ258E - Physik Instrumente

PI PZ258E P 763 Stage User Manual Version 1 0 0 Date 19 09 2014 This document describes the following product P 763 22C XY Nanopositioning System with Small Footprint and Large Aperture 200 um x 200 um Direct Metrology Capacitive Sensors Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Inst
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64. User Manual PZ45E - Physik Instrumente pdf User Manual PZ45E - Physik Instrumente

Piezo Nano Positioning PI PZ 45E User Manual E O single channel LvPZT Amplifier Release 2 2 3 Date 2005 01 31 This document describes the following product s E E 660 00 Single Channel Amplifier for LVPZTs desktop version E E 660 0E Single Channel Amplifier for LVPZTs OEM version ra Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoW
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65. User Manual PZ69E - Physik Instrumente pdf User Manual PZ69E - Physik Instrumente

Technical Documentation PI Operating Manual PZ 69E E 663 LVPZT Amplifier Release 2 1 0 NNS WANN SS Product Description and Operating Notes This document is valid for the following product E 663 00 Three Channel Amplifier for Low Voltage PZTs Release 2 1 0 Release Date 2004 01 09 Physik Instrumente PI GmbH amp Co KG 76228 Karlsruhe Germany FAX 49 721 4846 299 EMail info pi ws www pi ws E 663 00 LVPZT Amplifier User Manu
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66. User Manual PZ72E - Physik Instrumente pdf User Manual PZ72E - Physik Instrumente

Piezo Nano Positioning PI PZ 72E User Manual E 6 11 C CC cvpzt Controller Release 6 1 0 Date 2006 11 30 This document describes the following product s B F 610 CO LVPZT Controller OEM for Capacitive Sensors Strain gauge and LVDT sensor E 610 versions are described in a separate manual PZ 7OE O Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the
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67. User Manual PZ77E - Physik Instrumente pdf User Manual PZ77E - Physik Instrumente

Piezo Nano Positioning PI PZ 77E User Manual E 509 Position Servo Control Module Release 2 8 4 Date 2009 02 20 This document describes the following product s B E 509 Lx Position Servo Control Module for LVDT sensor B E 509 Sx Position Servo Control Module for SGS B E 509 CxA Position Servo Control Module for Capacitive sensors B E 509 E3 Position Servo Control Module for Single Plate PlSeca Capacitive Sensors B E 509 E03 Signal Conditioner for Single P
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68. User Manual PZ82E - Physik Instrumente pdf User Manual PZ82E - Physik Instrumente

PZ82E P 5x7 P 5x8 Stage User Manual Version 3 0 0 Date 05 09 2013 PI This document describes the following N products P 517 P 527 Precision XY Nanopositioning System P 517 2CD 2CL 100 um x 100 um P 527 2CD 2CL 200 um x 200 um P 517 P 527 Precision XYZ Nanopositioning System P 517 3CD 3CL 100 um x 100 um x 20 um P 527 3CD 3CL 200 um x 200 um x 20 um P 517 P 527 Precision XY Rotation Nanopositioning System P 517 RCD 100 um x 100 um
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69. User Manual PZ99E - Physik Instrumente pdf User Manual PZ99E - Physik Instrumente

Piezo Nano Positioning PI PZ 99E User Manual E 664 LVPZT Position Servo Controller Release 1 0 4 Date 2003 10 15 This document describes the following product s SS AAA AAA n E E 664 S3 LVPZT Servo Controller Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws E 664 LVPZT Position Servo Controller User Manu
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